The world's highest spectral resolution commercial echelle spectrometer series with Littrow arrangement - for the spectral measurement of emission and absorption lines, particularly in excimer laser lithography.
The ELIAS Emission Line Analyzing Spectrometer models belong to a worldwide unique monochromator series, with which a spectrally high-resolution quantitative measurement of narrowband laser lines with an intensity dynamic range of up to four orders of magnitude is possible. By using a CCD camera with a signal-to-noise ratio of up to 40,000, the line profiles can be detected simultaneously within their spectral environment. The patented optical design based on an echelle grating has an almost diffraction-limited imaging quality with a sufficiently high linear dispersion to be able to resolve the half-widths of the lines with 5 to 10 pixels at the typical pixel widths of the line detectors.
The use of a 360 mm wide echelle grating within a Littrow arrangement allows a single, double or even quadruple pass, depending on the ELIAS version. This allows either extremely precise line characterization with extremely high resolution or a larger inspection area analysis with reduced resolution and higher sensitivity. A camera focal length of 10 m is achieved with a 2.5 m offaxis paraboloid mirror and downstream anamorphic magnification optics with a tangential reproduction scale of 4:1.
The ELIAS spectrometers are thermally and mechanically extremely stable and have fully motorized optomechanics for automatic focusing and alignment of the spectrum to the detector. Chromatic aberrations are avoided by using reflective optics with broadband UV coatings. The radiation is coupled into the spectrometer via an SMA fiber or pure reflection transfer optics.
With the supplied Sophi software, all functions of the spectrometer-detector unit are controlled via an intuitive graphical user interface. A scan measurement mode enables the sequential measurement of a larger wavelength range than the spectrometer’s free spectral range. An optional LabVIEW library enables complete remote control of the ELIAS and thus integration into complex test stations.
The optical design of all models in the ELIAS series is identical to the standard ELIAS I version.
| Specification | ELIAS I / ELIAS VUV | ELIAS II | ELIAS III: | ELIAS LD | WAVEMETER |
|---|---|---|---|---|---|
| Basic specifications | |||||
| Optical design | Echelle monochromator in Littrow arrangement | ||||
| Aperture ratio | f/50 | 50 | 50 | 50 | 50 |
| Slit width | — | — | — | — | — |
| Wavelength range | — | — | — | — | — |
| Spectral resolution FWHM | — | — | — | — | — |
| Accuracy of the wavelength dial | better than ± 5 pm after calibration with internal mercury lamp | better than ± 5 pm after calibration with internal mercury lamp | better than ± 5 pm after calibration with internal mercury lamp | better than ± 5 pm after calibration with internal mercury lamp | better than ± 5 pm after calibration with internal mercury lamp |
| Simultaneous inspection area | — | — | — | — | — |
| Lineardispersion* | — | — | — | — | — |
| Dimensions without detector (L x W x H) | 1.400 x 310 x 250 | 1.400 x 310 x 250 | 1.400 x 310 x 250 | 1.400 x 310 x 250 | 1.400 x 310 x 250 |
| Weight without detector | 50 kg | 50 kg | 50 kg | 50 kg | 50 kg |
| Special features | — | — | — | — | — |
| Detector & System | |||||
| Detector | CCD –1.024 px | CCD –2.048 px | CCD –2.048 px | — | — |
| Exposure time, min. | 18 ms | 2 ms | 2 ms | — | — |
| Dynamic range | 16-bit AD conversion, realistic approx. 33,000:1 | 16-bit AD conversion, realistic approx. 33,000:1 | 16-bit AD conversion, realistic approx. 33,000:1 | 16-bit AD conversion, realistic approx. 33,000:1 | 16-bit AD conversion, realistic approx. 33,000:1 |
| Light injection | — | — | — | — | — |
| Wavelength calibration | with internal mercury lamp (253.652 nm) | with internal mercury lamp (253.652 nm) | with internal mercury lamp (253.652 nm) | with internal mercury lamp (253.652 nm) | with internal mercury lamp (253.652 nm) |
| Control | — | — | — | — | — |
| Software | Sophi, LabVIEW library optional | Sophi, LabVIEW library optional | Sophi, LabVIEW library optional | Sophi, LabVIEW library optional | Sophi, LabVIEW library optional |
ELIAS |
DEMON |
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